发明名称 Perpendicular write pole formation using durimide/alumina hard mask without CMP liftoff
摘要 A perpendicular write head includes a main pole comprising a Durimide/Alumina hard mask formed over a laminate layer process to form the main pole without using a liftoff or chemical mechanical polishing process, thereby avoiding rounding corners of the pole, the main pole being controlled in shape for improved control of critical dimension of track width and angle of the bevel to avoid undesirable adjacent track writing.
申请公布号 US2006028762(A1) 申请公布日期 2006.02.09
申请号 US20050195532 申请日期 2005.08.01
申请人 发明人 GAO YUNXIAO;GUTHRIE HUNG-CHIN;JIANG MING;ZHANG SUE S.
分类号 G11B5/127;G11B5/187 主分类号 G11B5/127
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