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发明名称
Verfahren und Vorrichtung zum Polieren von Halbleiterscheiben
摘要
申请公布号
DE60014994(T2)
申请公布日期
2006.02.09
申请号
DE20006014994T
申请日期
2000.02.21
申请人
INFINEON TECHNOLOGIES AG
发明人
LIN, CHENTING;VAN DEN BERG, ROBERT;PANDEY, SUMIT
分类号
B24B37/04;B24B57/02;H01L21/302;H01L21/304
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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