Methods of forming devices having optical functionality
摘要
<p>Provided is a method of forming a device having optical functionality. The method includes forming an optical waveguide over a substrate by providing a clad layer and a core over the substrate. The clad layer includes a polymer having units of the formula (RSiO 1.5 ), wherein R is a substituted or unsubstituted organic group, and a photoactive component. A portion of the clad layer is photolithographically patterned. Also provided is a method of forming a printed wiring board having optical functionality. The invention has particular applicability in the electronics industry for forming optoelectronic devices.</p>
申请公布号
EP1624735(A1)
申请公布日期
2006.02.08
申请号
EP20050254816
申请日期
2005.08.01
申请人
ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C.
发明人
SHELNUT, JAMES G.;PUGLIANO, NICOLA;MOYNIHAN, MATTHEW L.;SICARD, BRUNO M.