发明名称 |
Multilayer composites and manufacture of same |
摘要 |
The present invention is directed towards a process of depositing multilayer thin films, disk-shaped targets for deposition of multilayer thin films by a pulsed laser or pulsed electron beam deposition process, where the disk-shaped targets include at least two segments with differing compositions, and a multilayer thin film structure having alternating layers of a first composition and a second composition, a pair of the alternating layers defining a bi-layer wherein the thin film structure includes at least 20 bi-layers per micron of thin film such that an individual bi-layer has a thickness of less than about 100 nanometers.
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申请公布号 |
US6994775(B2) |
申请公布日期 |
2006.02.07 |
申请号 |
US20020209391 |
申请日期 |
2002.07.31 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
HOLESINGER TERRY G.;JIA QUANXI |
分类号 |
C23C14/34;C23C14/08;C23C14/28 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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