PLASMA ETCHING METHOD,申请号KR20047008790-传众专利搜索

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发明名称	PLASMA ETCHING METHOD
摘要
申请公布号	KR100549175(B1)	申请公布日期	2006.02.03
申请号	KR20047008790	申请日期	2004.06.07
申请人		发明人
分类号	C23F4/00;H01L21/00;H01L21/302;H01L21/3065;H01L21/308	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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