METHOD FOR FORMING PLURAL THIN-FILM DEVICES

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a plurality of thin-film elements, in which the number of mask master making processes of the process as a whole and of the etching processes can be reduced. SOLUTION: The method includes coarsely patterning at least one thin-film material (720-740) on a flexible substrate (710) and forming a plurality of thin-film elements on the flexible substrate (710) with a automatic-aligning imprint lithography (SAIL) process. COPYRIGHT: (C)2006,JPO&NCIPI