| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure and a treatment technique for improving the yield of a VCSEL having performance which passes a required reliability test. SOLUTION: In a device comprising a first mirror stack 210, a second mirror stack 230, and a cavity layer 220 provided between the first mirror stack 210 and the second mirror stack 230, a hole is formed penetrating through, at least, the first mirror stack 210. A gap 212 for demarcating the opening 140 extends into the first mirror stack 210 from the side wall of the hole. The end of the gap 212 formed in the side wall of the hole 270 at least is covered with a thin protection layer 250. COPYRIGHT: (C)2006,JPO&NCIPI
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