发明名称 |
Methods for the fabrication of thermally stable magnetic tunnel junctions |
摘要 |
Magnetic tunnel junctions and method for making the magnetic tunnel junctions are provided. The magnetic tunnel junctions are characterized by a tunnel barrier oxide layer sandwiched between two ferromagnetic layers. The methods used to fabricate the magnetic tunnel junctions are capable of completely and selectively oxidizing a tunnel junction precursor material using an oxidizing gas containing a mixture of gases to provide a tunnel junction oxide without oxidizing the adjacent ferromagnetic materials. In some embodiments the gas mixture is a mixture of CO and CO<SUB>2 </SUB>or a mixture of H<SUB>2 </SUB>and H<SUB>2</SUB>O.
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申请公布号 |
US2006021213(A1) |
申请公布日期 |
2006.02.02 |
申请号 |
US20040902281 |
申请日期 |
2004.07.29 |
申请人 |
WISCONSIN ALUMNI RESEARCH FOUNDATION |
发明人 |
CHANG Y. A.;YANG JIANHUA J.;LADWIG PETER F. |
分类号 |
H01L29/04;H01L31/112 |
主分类号 |
H01L29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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