Method of forming a BPSG film,申请号KR19990025454-传众专利搜索

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发明名称	Method of forming a BPSG film
摘要
申请公布号	KR100549335(B1)	申请公布日期	2006.02.02
申请号	KR19990025454	申请日期	1999.06.29
申请人		发明人
分类号	H01L21/312	主分类号	H01L21/312
代理机构		代理人
主权项
地址

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