| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain a temperature adjustment stage by a simple structure whereon the responsiveness of temperature adjustment is high and temperature non-uniformity does not occur, even without increasing pressure for supplying a temperature adjustment fluid so much. <P>SOLUTION: In a stage 10 comprising a temperature adjustment fluid duct provided on a placing surface for adjusting a temperature of the placing surface, the temperature adjustment fluid duct comprises at least one temperature adjustment fluid feeding port 31, at least one temperature adjustment fluid discharging port 32, and a plurality of ducts 33, 34 from the feeding port 31 to the discharging port 32 within the same plane under the placing surface. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
