| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mark identifying device, by which a mark to be measured can be identified from acquired images, without using a substrate having the mark. <P>SOLUTION: The shape and design size of a mark on a wafer 11 is registered to a recipe beforehand, and a mark on the wafer to be measured imaged at the start of measurement. From among the images acquired, a mark matching the shape and design size of the mark registered in the recipe is detected as the object of measurement. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
