| 摘要 |
PROBLEM TO BE SOLVED: To separate a change produced, for example, by variously looking a coating part at slightly different solid angles while performing observation at mutually markedly different angles. SOLUTION: This goniometric inspection device of optical surface characteristics is equipped with at least one first irradiator set to a predetermined first solid angle to irradiate a surface to be inspected and at least one first detector for catching the radiation reflected from the irradiated surface to be inspected. This detector makes the positionally resolved detection of the radiation and is arranged at least at a second predetermined spatial angle with respect to the surface to be inspected. In this case, at least one spatial angle set so as to arrange the irradiator and/or the detector is made variable. COPYRIGHT: (C)2006,JPO&NCIPI
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