| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement method for device characteristics to enhance measurement accuracy by reducing the effect of external noises. SOLUTION: All of data obtained by n-times of measurement under the same measurement conditions, are not integrated at one time, but are divided into m and put to repetitive integration of rather short time period. The results thereof are statistically processed to calculate the mean and standard deviationσon the integrated data. When dispersion is found equal to or more than a prescribed value, it is determined that external noises have come in to delete data widely deviating from the mean. Lacking data corresponding to the deleted data are supplemented by performing additional measurement. COPYRIGHT: (C)2006,JPO&NCIPI
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