| 摘要 |
PROBLEM TO BE SOLVED: To form an insulating layer which possesses contact holes, absorbs the level difference of an underlying layer and offers a flat surface by an ink-jet method. SOLUTION: The layer formation method using the ink jet method comprises a step (a) for discharging a first insulating material 31A having the first concentration on the first level surface, in order that the side of a first conductive layer 21 located on a first level surface may be covered by the first insulating material 31A; a step (b) for forming a first insulating layer 31B that contacts the first conductive layer 21 by activating and drying the discharged first insulating material 31A; a step (c) for discharging a second insulating material having a second concentration higher than the first concentration on the first conductive layer 21 and the first insulating layer 31B; and a step (d) for forming the second insulating layer which covers the first conductive layer 21 and the first insulating layer 31B, by activating and drying the discharged second insulating material. COPYRIGHT: (C)2006,JPO&NCIPI |
