| 发明名称 |
Process for removing organics from ultrapure water |
| 摘要 |
In order to reduce a total organic carbon (TOC) in ultrapure water to a level less than 1 ppb, several cycles of ozone contact/UV irradiation treatments are carried out in sequence. Preferably, the first cycle further includes an ion exchange treatment which is applied to the resulting UV irradiation water.
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| 申请公布号 |
US6991733(B2) |
申请公布日期 |
2006.01.31 |
| 申请号 |
US20040852166 |
申请日期 |
2004.05.25 |
| 申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
KIN KON-TSU;CHANG PEI-LIN;SHADMAN FARHANG;CHENG HSIAO-FEN |
| 分类号 |
B01D19/00;C02F1/04;C02F1/20;C02F1/32;C02F1/42;C02F1/78;C02F9/00 |
主分类号 |
B01D19/00 |
| 代理机构 |
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代理人 |
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