发明名称 |
Screen print under-bump metalization (UBM) to produce low cost flip chip substrate |
摘要 |
A method for forming an integrated circuit interconnect pad is described. In one embodiment a method of forming an integrated circuit comprises screen printing a conductive paste onto a terminal metalization pad and curing the conductive paste in an inert or reducing atmosphere at an elevated temperature to form an under-bump metalization layer of an interconnect pad. The elevated temperature is below a melting temperature of the terminal metalization pad.
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申请公布号 |
US6992001(B1) |
申请公布日期 |
2006.01.31 |
申请号 |
US20030434984 |
申请日期 |
2003.05.08 |
申请人 |
KULICKE AND SOFFA INDUSTRIES, INC. |
发明人 |
LIN PAUL T. |
分类号 |
H01L21/44;H01L;H01L21/60 |
主分类号 |
H01L21/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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