CERIUM POLISHING AGENT AND METHOD FOR PRODUCING CERIUM POLISHING AGENT

摘要

A cerium polishing agent containing lanthanum is characterized in that the Ce/La ratio (S) in the surface of a polishing particle is greater than the Ce/La ratio (B) of the whole polishing particle, namely (S>B). Such a cerium polishing agent can be produced by adding a step to the conventional methods for producing a cerium polishing agent for removing lanthanum-containing compound particles from a slurry after wet processing. The lanthanum-containing compound particles can be removed by adding a solution such as a mineral acid or a chelating agent, in which lanthanum hydroxide or lanthanum oxide is soluble, to the slurry.