Method for improving stability in micromechanical sensor, involves connecting direct current voltage that partially compensates for built-in voltage, to sensor

摘要

#CMT# #/CMT# The movable electrode and fixed electrode are arranged such that built-in voltage (Ubi) is associated with sensor. A direct current voltage (Udc) that partially compensates for the built-in voltage, is connected to sensor. The sum of direct current voltage and built-in voltage is controlled towards zero. #CMT# : #/CMT# An independent claim is also included for micromechanical sensor. #CMT#USE : #/CMT# For improving stability in micromechanical sensor (claimed). #CMT#ADVANTAGE : #/CMT# Improves stability in micromechanical sensor and reduces temperature factor in sensor. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The figure shows a schematic view of mechanical sensor.