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发明名称
Mikromembranpumpe
摘要
申请公布号
DE19720482(C5)
申请公布日期
2006.01.26
申请号
DE19971020482
申请日期
1997.05.16
申请人
INSTITUT FUER MIKROTECHNIK MAINZ GMBH
发明人
KAEMPER, KLAUS-PETER;DOEPPER, JOACHIM
分类号
F04B43/04;F04B45/047;F04B53/10
主分类号
F04B43/04
代理机构
代理人
主权项
地址
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