| 摘要 |
PROBLEM TO BE SOLVED: To steadily determine a focused state or adjust a focal point, regardless of the state of the surface of a specimen. SOLUTION: The microscope includes: an observation optical system 2 for observing the image of a specimen face 4a, formed by an objective lens 6; and an illuminating optical system 3 for projecting the image of an index 12 onto the specimen face and causing vertical illuminating on the specimen face. A split prism 8 is disposed in the position where imaging takes place by the objective lens 6. Using the objective lens 6, light reflected from the specimen face 4a and index 12 is imaged onto the split prism 8. The image is observed with the eyepiece lens 7 and focusing is detected. In a focused state, the image of the index 12 is formed on an imaging position on the split prism 8. In a defocusing state, the image of the index 12 is laterally deviated in a wedge direction relative to a separating line of wedge prisms 8a and 8b. COPYRIGHT: (C)2006,JPO&NCIPI
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