| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generator of which the shape, caliber and length of a discharge chamber are not limited depending on a size of an antenna, since an antenna itself for plasma generation is disposed inside the vacuum vessel, unlike a conventional generator having a high-frequency antenna outside a vacuum vessel. <P>SOLUTION: The whole of the antenna is housed inside a vacuum vessel 17 of the plasma generator. The antenna is composed of a plurality of wire-like conductors 18a-18f, and the whole of induced field radiated from the antenna is made to be utilized effectively, and generation of abnormal discharge is suppressed by reducing inductance of the antenna to stabilize high-density plasma. The degree of freedom in antenna arrangement is heightened by supporting respective end parts of each wire-like conductors to an inner wall of the vacuum vessel by independent lead-in terminals and connecting them in parallel at the outside of the vacuum vessel. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
