发明名称 |
Polarizing element, method of manufacturing polarizing element, method of evaluating exposure apparatus, method of manufacturing semiconductor device, and exposure apparatus |
摘要 |
A polarizing element is disclosed which includes a smooth glass substrate and a polarization layer formed thereon, the polarization layer having polarization characteristics for the incident light. The polarization layer is made of a carbon-based substance including carbon atoms. The carbon atoms are continuously connected via carbon-carbon double bonds having [pi] electron clouds. The [pi] electron clouds have average continuous distance of 100 nm or more in a longitudinal direction and have an average continuous distance less than 50 nm in a transverse direction. The carbon-based substance is formed in such a way that a plurality of the [pi] electron clouds have longitudinal directions which are in parallel along the glass-substrate surface.
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申请公布号 |
US2006018018(A1) |
申请公布日期 |
2006.01.26 |
申请号 |
US20050168867 |
申请日期 |
2005.06.29 |
申请人 |
NOMURA HIROSHI;ASAKAWA KOJI;MOTOI YUICHI |
发明人 |
NOMURA HIROSHI;ASAKAWA KOJI;MOTOI YUICHI |
分类号 |
G02B27/28;G02B5/30 |
主分类号 |
G02B27/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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