| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing pad capable of performing polishing with high flatness having a structure of a laser beam transmission window allowing observation of a polishing condition for a workpiece to be polished by the use of a laser beam while preventing the window member of the laser beam transmission window from inhibiting the flow of polishing slurry, and to provide a method for manufacturing the polishing pad. <P>SOLUTION: This polishing pad 4 is provided with grooves 11, 12 for retaining the polishing slurry on the surface side serving as a polishing surface, and the laser beam transmission window with the window member 10 buried therein. The window member 10 is provided with the groove 12 on its surface, and is configured to be a part of the polishing surface. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
