ULTRASONIC WAVE VIBRATION DEVICE AND WET PROCESSING APPARATUS USING THE SAME,申请号KR20040046576-传众专利搜索

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发明名称	ULTRASONIC WAVE VIBRATION DEVICE AND WET PROCESSING APPARATUS USING THE SAME
摘要
申请公布号	KR100546425(B1)	申请公布日期	2006.01.26
申请号	KR20040046576	申请日期	2004.06.22
申请人		发明人
分类号	B08B3/12;B06B1/06;H01L21/027;H01L21/304	主分类号	B08B3/12
代理机构		代理人
主权项
地址

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