| 摘要 |
PROBLEM TO BE SOLVED: To provide a compacted microscope system comprising a scanning probe microscope and an optical microscope. SOLUTION: The microscope system 1 is provided with an atomic force microscope 10 and the optical microscope 20. An electrically driven zoom lens barrel 23 of the optical microscope 20 is arranged so as to extend in a Z axis direction at a side of a sample mounting stand 30, and an optical axis conversion mirror is arranged at an upper end part of the electrically driven zoom lens barrel 23. A lens-housing section 21 of the optical microscope 20 is attached to an optical axis conversion section 22, and the optical axis converting section 22 is attached to the upper end part of the electrically driven zoom lens barrel 23. A CCD camera (a charge-coupled device camera) 24 is provided at the lower end part of the electrically driven zoom lens barrel 23. The light reflected from a sample M is reflected by a mirror and then is reflected by the optical axis conversion mirror of the optical axis converting section 22 through a lens of the lens housing section 21. Reflected light by the optical axis conversion miller is taken in the CCD camera 24 through the electrically driven zoom lens barrel 23. COPYRIGHT: (C)2006,JPO&NCIPI
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