发明名称 METHOD FOR PROTECTING A PNEUMATIC CONTROL SYSTEM FROM INGESTED CONTAMINATION
摘要 A pneumatic control system (100) including at least one flow control line (140a, 140b, 140c) having a connecting line (142) connectable to a fluid line (20a, 20b, 20c) of a pneumatically operated machine (18), a vacuum line (146) connectable to a vacuum source (32), a vacuum valve (144) controlling flow between the connecting line (142) and the vacuum line (146), a pressure line (106) connectable to a source of fluid under pressure (34), and a pressure valve (50) controlling flow between the connecting line (142) and the pressure line (106). A pressure manifold (102) defines the pressure line (106) and a first portion of the connection line, and supports the pressure valve (50), and a vacuum manifold (104) defines the vacuum line (146) and a second portion of the connecting line, and supports the vacuum valve (144). The vacuum manifold (104) is adapted for replacement independently of the pressure manifold (102).
申请公布号 WO2004112097(A3) 申请公布日期 2006.01.26
申请号 WO2004US18578 申请日期 2004.06.14
申请人 MKS INSTRUMENTS, INC.;POULIN, JAMES, M.;CLARK, WILLIAM, R. 发明人 POULIN, JAMES, M.;CLARK, WILLIAM, R.
分类号 B24B37/005;F16K37/00;H01L 主分类号 B24B37/005
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