发明名称 |
METHOD FOR PROTECTING A PNEUMATIC CONTROL SYSTEM FROM INGESTED CONTAMINATION |
摘要 |
A pneumatic control system (100) including at least one flow control line (140a, 140b, 140c) having a connecting line (142) connectable to a fluid line (20a, 20b, 20c) of a pneumatically operated machine (18), a vacuum line (146) connectable to a vacuum source (32), a vacuum valve (144) controlling flow between the connecting line (142) and the vacuum line (146), a pressure line (106) connectable to a source of fluid under pressure (34), and a pressure valve (50) controlling flow between the connecting line (142) and the pressure line (106). A pressure manifold (102) defines the pressure line (106) and a first portion of the connection line, and supports the pressure valve (50), and a vacuum manifold (104) defines the vacuum line (146) and a second portion of the connecting line, and supports the vacuum valve (144). The vacuum manifold (104) is adapted for replacement independently of the pressure manifold (102). |
申请公布号 |
WO2004112097(A3) |
申请公布日期 |
2006.01.26 |
申请号 |
WO2004US18578 |
申请日期 |
2004.06.14 |
申请人 |
MKS INSTRUMENTS, INC.;POULIN, JAMES, M.;CLARK, WILLIAM, R. |
发明人 |
POULIN, JAMES, M.;CLARK, WILLIAM, R. |
分类号 |
B24B37/005;F16K37/00;H01L |
主分类号 |
B24B37/005 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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