| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscopic device capable of easily setting the needle point of an operation needle to the vicinity of the target position of a sample. SOLUTION: The microscopic device 100 is equipped with an objective 13, an objective driving means 17 for driving the objective, a position detection means 4 for detecting information on the position of the objective in a Z-axis direction, a manipulator 21 capable of being electrically controlled and having the operation needle 23 for performing fine operation to the sample 3, a manipulator driving means 27 for driving the operation needle of the manipulator, an electric switching means 29 for interlocking/not interlocking the objective driving means with the manipulator driving means, and a control means 6 for controlling the manipulator driving means on the basis of detected information by the position detection means so as to drive the operation needle of the manipulator when the switching means interlocks them, and drive the operation needle of the manipulator by the manipulator driving means when the switching means does not interlock them. COPYRIGHT: (C)2006,JPO&NCIPI
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