| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an improved type drive device for at least partially compensating for the relative displacement between an object to be driven and an actuator for driving it. <P>SOLUTION: The positioning device for positioning an object comprises a first actuator and a connector, arranged in between the first actuator and the object. The connector includes an elastic member and a second actuator connected to the elastic member, in series. The first actuator is configured and arranged, such that a force applies onto the connector in a first direction and the second actuator is controlled, such that the distance in the first direction between the first object and the object is kept substantially constant. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
