| 摘要 |
A radio frequency (RF) probe analysis system (20) has a broadband design. The analysis system (20) includes a sampling unit (22) for generating digital power signals (26a, 26b, 50a, 50b) based on a plurality of analog signals (28, 30). The analog signals (28, 30) characterize power delivered from an RF power delivery system to a plasma chamber (13). The analysis system (20) further includes a digital processing unit (24) for generating a digital spectrum signal based on the digital power signals (26a, 26b, 50a, 50b). The sampling unit (22) simultaneously samples a first plurality of frequencies from the analog signals (28, 30) such that the digital spectrum signal defines signal levels for the first plurality of frequencies. The sampling unit (22) may also simultaneously sample a second plurality of frequencies from the analog signals (28, 30) such that the digital spectrum signal further defines signal levels for the second plurality of frequencies. The broadband architecture of the sampling unit enables closed loop control of power delivered to the camber (13) to tolerances. |
