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发明名称
METHOD OF PRODUCING CALIBRATION STRUCTURES IN SEMICONDUCTOR SUBSTRATES
摘要
申请公布号
EP1144973(B1)
申请公布日期
2006.01.25
申请号
EP19990962107
申请日期
1999.11.26
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER
发明人
NEUMEIER, KARL;BOLLMANN, DIETER
分类号
B81C1/00;G01L9/00;B81B3/00;G03F9/00;H01L23/544
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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