摘要 |
It is to provide a ceramic heater being easy in temperature control, thin and light as well as an electrically conductive paste for the formation of a heating body used in the heater, and is characterized in that a heating body formed by sintering metal particles and, if necessary, a metal oxide is arranged on a surface or an inside of a ceramic substrate comprised of a nitride ceramic or carbide ceramic. And also, a paste formed by mixing metal particles and a metal oxide is used as the electrically conductive paste. <IMAGE>
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