发明名称 |
Method of determining local structures in optical crystals |
摘要 |
The method for determining local structures in optical materials, especially crystals, includes observing schlieren visually in a material to be tested with divergent white light in a first step; measuring birefringence of polarized laser light in the material to determine local defects and structure faults in the material with a spatial resolution of 0.5 mm or better in a second step if the material is judged to be suitable in the first step and then interferometrically measuring the material to determine the faults in the material by interferometry in a third step if the material is judged to be suitable in the first and second steps. This method can be part of a method for making optical components, especially for microlithography.
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申请公布号 |
US6989904(B2) |
申请公布日期 |
2006.01.24 |
申请号 |
US20030464402 |
申请日期 |
2003.06.18 |
申请人 |
SCHOTT AG |
发明人 |
MOERSEN EWALD;ENGEL AXEL;LEMKE CHRISTIAN;GRABOSCH GUENTER |
分类号 |
G01B9/02;G01B11/30;G01J4/00;G01M11/00;G01N21/00;G01N21/23;G01N21/45;G01N21/896;G01N21/958;G03F7/20 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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