发明名称 SEMICONDUCTOR DEVICE HAVING AMORPHOUS BARRIER LAYER FOR COPPER METALLURGY
摘要 <p>A semiconductor device which includes, between a copper conductive layer and a low-k organic insulator, a barrier layer comprising an amorphous metallic glass, preferably amorphous tantalum-aluminum. A method of making the semiconductor device is also disclosed.</p>
申请公布号 KR100544545(B1) 申请公布日期 2006.01.24
申请号 KR20030051497 申请日期 2003.07.25
申请人 发明人
分类号 H01L21/3205;H01L21/28;H01L21/312;H01L21/768;H01L23/532 主分类号 H01L21/3205
代理机构 代理人
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