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发明名称
Open-closing valve of the semiconductor equipment
摘要
申请公布号
KR100544321(B1)
申请公布日期
2006.01.23
申请号
KR20040039806
申请日期
2004.06.01
申请人
发明人
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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