| 摘要 |
A coating system for coating a core insert includes a vacuum chamber ( 19 ) for providing a coating space, a pump system ( 10 ) for evacuating the vacuum chamber ( 19 ), a DC power supplier ( 18 ), a DC magnetron ( 14 ), and a gas-in system ( 16 ) for providing the vacuum chamber ( 19 ) a sputtering gas. The DC power supplier ( 18 ) has a negative end ( 181 ) and a positive end ( 182 ). The DC magnetron 14 is installed on one side of the vacuum chamber ( 19 ), and connects to the negative end ( 181 ) of the DC power supplier ( 18 ). Another kind of coating system includes, among other things, an RF power supplier ( 28 ) instead of a DC power supplier ( 18 ).
|
