| 摘要 |
A test apparatus for a mixed-signal semiconductor device that includes a plurality of event tester modules including analog and digital signal tester boards, a test head for event tester modules, a performance board including a socket for a DUT, a test fixture including a connection means, an option circuit for when the DUT is a mixed-signal integrated circuit including an analog and digital function blocks, a tester controller controlling the overall operation, and a switching parallel connection circuit sequentially connecting a single event tester board with a plurality of the DUTs. The event tester board and the DUTs are connected by a group unit. The number of parallel test is increased by an improved tester board or an improved performance board without the use of an extra event tester board for an analog signal test.
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