| 摘要 |
PROBLEM TO BE SOLVED: To suppress the increase of a loss at the time of making thin a thin film conductor by reducing the electric resistance of a thin film conductor configuring the electrode of an surface acoustic wave element. SOLUTION: In this surface acoustic wave element, an electrode 6 serving as an inter-digital transducer is formed on a piezoelectric substrate 1, and the electrode 6 includes the laminate structure of a conductive layer 2 made of metal, and an electronic diffusion suppressing layer 3 constituted of a semiconductor whose potential barrier should be formed on its interface with the conductive layer 2. COPYRIGHT: (C)2006,JPO&NCIPI
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