| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a uniform film with a homogeneous membrane thickness by a spray thermal decomposition method on a substrate having a minute uneven surface. SOLUTION: An oxide precursor solution is sprayed on a heated substrate surface having an uneven surface which minimum spacing S of projection top is 1-60μm and a ratio (H/S) between a height H and a spacing S is more than 0.2 in a mist condition that a drop which diameter (d) is smaller than the minimum spacing S×0.8 of the uneven surface comprises more than 80% in volume ratio. COPYRIGHT: (C)2006,JPO&NCIPI
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