| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid drop delivery apparatus capable of making thickness of the whole of the formed film uniform and simplifying a constitution of the apparatus by suppressing large size of complexity of the apparatus, and a thin film formation method using this. SOLUTION: The liquid drop delivery apparatus 30 has a liquid drop delivery head 34 provided above a stage 39 placed with a substrate S and delivering the liquid drop onto the substrate S; and a flushing area F provided on at least a side relative to a movement axis of the stage 39. A first vessel 50 for receiving the liquid drop by flushing from the liquid drop delivery head 34 is provided on the flushing area F and a second vessel 52 is connected to the first vessel 50. The second vessel 52 stores the same solvent or dispersion medium as the solvent or the dispersion medium in the liquid drop delivered from the liquid drop delivery head 34 and is communicated with the inside of the first vessel 50. A transferring means 53 for transferring the solvent or the dispersion medium at the inside into the first vessel 50 is provided on the second vessel 52. COPYRIGHT: (C)2006,JPO&NCIPI
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