发明名称 Production process for an electrically functional layer structure for semiconductor technology forms and applies mask by gravure process and structures a material layer
摘要 <p>A production process for an electrically functional layer structure comprises forming such a layer (30,30') to cover a substrate (20) and using a mask (40') to cover part of the layer and selectively removing material from unmasked regions. The mask is brought to the upper surface of the material by a gravure process.</p>
申请公布号 DE102004031719(A1) 申请公布日期 2006.01.19
申请号 DE20041031719 申请日期 2004.06.30
申请人 INFINEON TECHNOLOGIES AG 发明人 HALIK, MARCUS;BRAUN, STEFAN;KLAUK, HAGEN;ZSCHIESCHANG, UTE;SCHMID, GUENTER
分类号 B41C1/00;H01L51/40 主分类号 B41C1/00
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