LASER-FORMED ELECTRODES FOR SOLAR CELLS

摘要

A method of forming electrodes for solar cells, the method comprising: depositing a dielectric layer (300) on a surface of a semiconductor layer (302) of the solar cell, laser ablating the dielectric layer to form a series of openings (304), each opening extending through the entire thickness of the dielectric layer (300), forming doped regions (305) in the semiconductor layer exposed in the openings, forming metal-semiconductor electrical contacts in the respective openings, wherein deposited metal is in contact with the formed doped semiconductor regions (305) through the respective openings (304), and forming a metal contact (306) electrically interconnecting the metal-semiconductor contacts, wherein the metal contact is formed such that the respective openings (304) are filled with metal through the entire thickness of the dielectric layer (300) and the metal interconnects adjacent metal-semiconductor contacts.