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经营范围
发明名称
A METHOD FOR DEPOSITING THIN FILM ON A WAFER
摘要
申请公布号
KR20060006196(A)
申请公布日期
2006.01.19
申请号
KR20040055097
申请日期
2004.07.15
申请人
INTEGRATED PROCESS SYSTEMS LTD.
发明人
LIM, HONG JOO;LEE, SANG IN;LEE, SAHNG KYOO;SEO, TAE WOOK;CHANG, HO SEUNG
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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