| 摘要 |
PROBLEM TO BE SOLVED: To detect an ion balance by a simple structure exactly, make miniaturization and reduction of a production cost possible, and make the detection possible regarding the ion balance at a point close to a surface of an object to be electrically neutralized. SOLUTION: The ion balancer includes an antenna 20 which is charged with a positive ion or a negative ion, and a normally-on type MOSFET 11 where the antenna 20 is connected to a gate electrode G, an ion balance detecting resistor R is connected between a grounded source electrode S and a gate electrode G, and a direct current power source V<SB>DS</SB>and a load resistor R<SB>L</SB>are connected between the source electrode S and a drain electrode D in series. The voltage of the gate electrode G is varied by a voltage drop caused from the current passing between the charged antenna 20 and the ground through the ion balance detecting resistor R, then, the variation of the drain current due to this voltage is detected, and the positive/negative balance of the ion which charged the antenna is detected. COPYRIGHT: (C)2006,JPO&NCIPI |
