LASER ANALYTICAL INSTRUMENT, LASER ANALYTICAL METHOD, AND GAS LEAK INSPECTION INSTRUMENT

摘要

Laser light generated from a laser light generating means (10) is fed through a laser light transfer means (11) including a demagnification optical system (23) to be condensed at a part Ex where an object gas of analysis exists. The laser light is imparted with energy for generating a multiple photon excitation or ionization phenomenon of gas at the condensation part Ex. The laser light can inject energy of 17 eV or above into hydrogen molecules when the object gas of analysis is hydrogen, and can inject energy of 23 eV or above into helium atoms when the object gas of analysis is helium. For example, intensity of laser light at the condensation part Ex is set at 10