| 摘要 |
PROBLEM TO BE SOLVED: To prevent an inspected substrate from coming out of an inspection stage by inertia force thereof, even when the inspected substrate is displaced at a high speed. SOLUTION: This substrate presser for an inspection device is provided with a support base arranged in the inspection stage, an arm member supported swingably by the support base, a presser member supported by the arm member, and displaced between a pressing position for pressing the inspected substrate onto the inspection stage and a pressing releasing position for releasing the pressing of the inspected substrate, and a driving means for displacing the presser member between the pressing position and the pressing releasing position. Structure is simplified thereby and a size is also reduced thereby. Resultingly, the inertia force gets small as the whole presser, and a displacement time of the inspection stage is shortened thereby. COPYRIGHT: (C)2006,JPO&NCIPI
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