发明名称 |
MEMS gyroscope having coupling springs |
摘要 |
A MEMS gyroscope with coupling springs and mass bodies symmetrical to one another and relatively movable in a vertical direction with respect to a substrate, where a coupling spring connects the mass bodies and moves the mass bodies in a vertical direction as another one of the mass bodies moves in the opposite vertical direction.
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申请公布号 |
US2006010978(A1) |
申请公布日期 |
2006.01.19 |
申请号 |
US20050182774 |
申请日期 |
2005.07.18 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE SANG-WOO;LEE BYEUNG-LEUL;KIM JONG-PAL;CHOI JOON-HYOCK |
分类号 |
G01P15/08 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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