发明名称 DEVICE FOR MICROWAVE PLASMA DEPOSITION OF A COATING ON A SURFACE OF A THERMOPLASTIC CONTAINER
摘要 The invention concerns a device (1) for depositing a coating on a surface of a thermoplastic container (10) using a low pressure plasma derived from a precursor gas excited by UHF electromagnetic waves in a circular vacuum cavity housing the container, said device comprising a UHF generator (3) connected through a waveguide (4) to a window (5) of the side wall of the cavity enclosing a UHF wave-transparent envelope (6) and arranged coaxially to a central field, two outer trays (14, 15) respectively upper and lower with adjustable vertical positioning for adjusting the return field impedance, and respective columns (16, 17) for adjustable support of both trays; at least one support column (16) of the upper tray (14) made of a UHF wave-transparent material.
申请公布号 WO2006005837(A2) 申请公布日期 2006.01.19
申请号 WO2005FR01475 申请日期 2005.06.14
申请人 SIDEL;RIUS, JEAN-MICHEL 发明人 RIUS, JEAN-MICHEL
分类号 B05D7/02;B05D7/22;C23C16/04;C23C16/511;C23C16/513;H01J37/32;H05H1/46 主分类号 B05D7/02
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