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发明名称
SEMICONDUCTOR MANUFACTURING EQUIPMENT HAVING A PARTICLE ADHESION APPARATUS
摘要
申请公布号
KR20060005934(A)
申请公布日期
2006.01.18
申请号
KR20040054938
申请日期
2004.07.14
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JUNG NAM
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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