| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing system wherein situations of examination devices are simultaneously grasped remotely (at a distance place) in a semiconductor device manufacture line including the plurality of examination devices, and judgement on results of examinations and an instruction of next processing are easily performed. SOLUTION: A manufacturing system utilizes a manufacture execution system (MES) and is comprised of a plurality of examination devices 13a,..., 13n, an MES server 11 and MES clients 12a,..., 12m or the like. The MES server 11 manages examination implementations and examination results in the examination devices 13a,..., 13n. Each of the MES clients 12a,..., 12m includes: a device operating state list display for displaying a list of working states of the examination devices 13a,..., 13n; an examination result/lot next processing designation display for displaying an examined result of an examination target lot; and an examination target lot next processing designating section for inputting an instruction of next processing for the examination target lot. COPYRIGHT: (C)2006,JPO&NCIPI
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