| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a magnetic sensing element capable of preventing degradation in reproduction output by preventing a conductive substance from sticking to a magnetoresistance effect element. SOLUTION: A first metal layer 24 is used as a mask layer in ion milling process with a multilayer film T1. Although a resist for lifting off which has been used as a conventional mask layer has a notch formed at its lower part, the first metal layer 24 is laminated on the multilayer film T1 by an even constant film thickness, and no notch is formed. Since the upper surface of multilayer film T1 is entirely covered with the first metal layer 24 and an insulating layer 23, the chips of multilayer film T1 generated by ion milling are prevented from re-sticking to the upper surface of multilayer film T1. COPYRIGHT: (C)2006,JPO&NCIPI
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